A generalized methodology for thermoelastic damping in axisymmetric vibration of circular plate resonators covered by multiple partial coatings

Microresonators used for microelectromechanical systems (MEMS) are becoming more and complex in terms of structural geometry mode shapes. Accompanying this increase complexity is the challenge to develop an accurate analytical method evaluate thermoelastic damping (TED). This paper firstly presents a generalized methodology TED axisymmetric vibration circular plate microresonators covered by multiple partial coatings. The frequency shape function plates solved Kirchhoff–Love theory. temperature fields acquired solving one-way coupled heat conduction along thickness direction with Green’s method, accordingly obtaining effects coating on microplate. present model can reduce that fully bilayer plates, validated finite element (FEM). produces explicit form one infinite series rapid converge, simple given retaining first term. accuracy practicality investigated. results suggest SiO2 thermally perfect interfaces at fundamental mode. However, significantly increases values imperfect interfaces. Three distinctive peaks spectra Si/DLC/SiO2 observed. work be utilized optimize composite microplates gain insights into intrinsic dissipation.